Sabioni, Antônio Claret SoaresFreire Júnior, Fernando LázaroLeite Filho, Carlos Vieira BarrosAmami, B. A.Dolin, C.Monty, C.Millot, F.2012-07-162012-07-161993SABIONI, A. C. S. et al. Study of oxygen self-diffusion in oxides by ion beam techniques : comparison between nuclear reaction analysis and SIMS. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, v. 73, n. 1, p. 85-89, jan. 1993. Disponível em: <https://www.sciencedirect.com/science/article/pii/0168583X9396056I>. Acesso em: 16 jul. 2012.0168583Xhttp://www.repositorio.ufop.br/handle/123456789/1131Oxygen self-diffusion in Fe,_,0 single crystals has been studied by means of the isotope exchange method in Hz/Hz”0 atmospheres. The ‘*O concentration profiles were determined by using two different techniques based on ion beams: secondary ion mass spectrometry (SIMS) and nuclear reaction analysis (NRA); the latter by means of the narrow nuclear resonance reaction ‘“O(p, o)“N at 629 keV, r = 2.1 keV. The diffusion coefficients obtained from the analysis of the measured profiles are in good agreement with those found in the literature. To compare the depth resolution and sensitivity of both techniques, the “0 profiles of implanted Cr,O, single crystals (Erso = 50 keV, fluence = 1.6 X lOI ions/cm’) were also measured.en-USArtigo publicado em periodicoO periódico Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms concede permissão para depósito do artigo no Repositório Institucional da UFOP. Número da licença: 3345930873045.